Immersion Lithography

OPTICAL LITHOGRAPHY

The dramatic increase in performance and cost reduction in the electronics industry are attributable to innovations in the integrated circuit and packaging fabrication processes. ICs are made using Optical Lithography. The speed and performance of the chips, their associated packages, and, hence, the computer systems are dictated by the lithographic minimum printable size. Lithography, which replicates a pattern rapidly from chip to chip, wafer to wafer, or substrate to substrate, also determines ....etc

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NANO-Lithography
Outline
Roadmap for Lithography
Photolithography
State of art Lithography
Lithography Road Map
Liquid immersion lithography
Improvement of immersion lithography
Immersion lithography system
Immersion lithography system
Immersion lithography Defects
Issues with Immersion Lithography
Very big lenses (hence expensive) !!
Field size reduction ?
Mechanical issues and hydrodynamics
Bubble formation disturbing the image
Stage vibrations transferred to lens
Heati ....etc

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1. INTRODUCTION

Silicon has been the heart of the world's technology boom for nearly half a century, but microprocessor manufacturers have all but squeezed the life out of it. The current technology used to make microprocessors will begin to reach its limit around 2006. At that time, chipmakers will have to look to other technologies to cram more transistors onto silicon to create more powerful chips. Many are already looking at extreme-ultraviolet lithography (EUVL) as a way to extend the life of silicon at least un ....etc

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please provide me more information on the topic uv imprint lithography.... ....etc

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The growth of the semiconductor industry is driven by Moore?s law: ?The complexity for minimum component cost has increased at a rate of roughly a factor of two per year?. Notice that Moore observed that not only was the number of components doubling yearly, but was doing so at minimum cost.

One of the main factors driving the improvements in complexity and cost of ICs is improvements in optical lithography and the resulting ability to print ever smaller features.

Recently optical lithography, the backbone of the industry for 45 years ha ....etc

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please send me presentation on extreme ultraviolet lithography..... ....etc

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The growth of the semiconductor industry is driven by Moore’s law: “The complexity for minimum component cost has increased at a rate of roughly a factor of two per year”. Notice that Moore observed that not only was the number of components doubling yearly, but was doing so at minimum cost. One of the main factors driving the improvements in complexity and cost of ICs is improvements in optical lithography and the resulting ability to print ever smaller features. Recently optical lithography, the backbone of the industry for 45 years h ....etc

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hi pls i need types of lithography in vlsi fabrication... ....etc

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i want a ppt presentation on immersion lithography for taking a seminar ....etc

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