Fabrication of MOSFETs



Introduction

Integrated circuits: many transistors on one chip.
Very Large Scale Integration (VLSI): millions of logic gates + many Mbits of memroy
Complementary Metal Oxide Semiconductor
Fast, cheap, low power transistors
Today: How to build your own simple CMOS chip
CMOS transistors
Building logic gates from transistors
Transistor layout
Rest of the course: How to build a good CMOS chip

Invention of the Transistor
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Modeling and Fabrication of Vertical Pillar MOSFETs Made in
Recrystallized Si



INTRODUCTION
Vertical pillar MOSFETs fabricated in recrystallized silicon
have shown the benefits of designing high density DRAMS .
However, these devices have traps in the channel originating
from dislocations and stacking faults . These traps affect
the charge profile in the device causing unpredictable electrical
characteristics. Therefore it is necessary to establish an analytica ....etc

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