MOSFET - Metal Oxide Semiconductor Field Effect Transistors
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MOSFET
Metal Oxide Semiconductor Field Effect Transistors

 Different types of FETs
 Junction FET (JFET)
 Metal-Oxide-Semiconductor FET (MOSFET)
 Metal-Semiconductor FET (MESFET)
 Different types of FETs
 Junction FET (JFET)
 Different types of FETs
 Metal-Oxide-Semiconductor FET (MOSFET)
 Different types of FETs
 Metal-Semiconductor FET (MESFET)
Basic MOSFET (n-channel)
 The gate electrode is placed on top of a very thin insulating layer.
 There are a pair of small n-type regions just under the drain & source electrodes.
 If apply a +ve voltage to gate, will push away the ‘holes’ inside the p-type substrate and attracts the moveable electrons in the n-type regions under the source & drain electrodes.
 Increasing the +ve gate voltage pushes the p-type holes further away and enlarges the thickness of the created channel.
 As a result increases the amount of current which can go from source to drain — this is why this kind of transistor is called an enhancement mode device.
 Cross-section and circuit symbol of an n-type MOSFET.
 An n-channel MOS transistor. The gate-oxide thickness, TOX, is approximately 100 angstroms (0.01 mm). A typical transistor length, L = 2 l. The bulk may be either the substrate or a well. The diodes represent pn-junctions that must be reverse-biased
Basic MOSFET (p-channel)
 These behave in a similar way, but they pass current when a -ve gate voltage creates an effective p-type channel layer under the insulator.
 By swapping around p-type for n-type we can make pairs of transistors whose behaviour is similar except that all the signs of the voltages and currents are reversed.
 Pairs of devices like this care called complimentary pairs.
 In an n-channel MOSFET, the channel is made of n-type semiconductor, so the charges free to move along the channel are negatively charged (electrons).
 In a p-channel device the free charges which move from end-to-end are positively charged (holes).
 Note that with a n-channel device we apply a +ve gate voltage to allow source-drain current, with a p-channel device we apply a -ve gate voltage.
Structure and principle of operation
 A top view of MOSFET, where the gate length, L, and gate width, W.
 Note that L does not equal the physical dimension of the gate, but rather the distance between the source and drain regions underneath the gate.
 The overlap between the gate and the source/drain region is required to ensure that the inversion layer forms a continuous conducting path between the source and drain region.
 Typically this overlap is made as small as possible in order to minimize its parasitic capacitance.
MOSFET-Basic Structure
 I-V Characteristics of MOSFET
 Ideal Output Characteristics of MOSFET
 Types of MOSFET
 Subthreshold region
 Channel Length
 MOSFET Dimensions - Trend
 MOSFET scaling scenario
 Voltage Scaling
 Power Supply Voltage
 Threshold Voltage
 Gate Oxide Thickness
Channel Profile Evolution
 MOSFET Capacitances
 MOSFET Capacitances
 Overlap Capacitance
 Gate Resistance
 Components of Cin and Cout
New materials needed for scaling
 Since the early 1980s, the materials used for integrated MOSFET on silicon substrates have not changed greatly.
 The gate “metal” is made from highly-doped polycrystalline Si.
 The gate oxide is silicon dioxide.
 For the smallest devices, these materials will need to be replaced.
New Gate Oxide
 The capacitance per area of the gate oxide is
 Scaled MOSFETs require larger Cox, which has been achieved with smaller tox.
 Increasing K can also increase Cox, and other oxides, “high-K dielectrics” are being developed, including for example, mixtures of HfO2 and Al2O3.
 New Gate Metal
 The doped polycrystalline silicon used for gates has a very thin depletion layer, approximately 1 nm thick, which causes scaling problems for small devices.
 Others metals are being investigated for replacing the silicon gates, including tungsten and molybdenum.
Removing the substrate:
Silicon on Insulator (SOI)

 For high-frequency circuits (about 5 GHz and above), capacitive coupling to the Si substrate limits the switching frequency.
 Also, leakage into the substrate from the small devices can cause extra power dissipation.
 These problems are being avoided by making circuits on insulating substrates (either sapphire or silicon dioxide) that have a thin, approximately 100 nm layer of crystalline silicon, in which the MOSFETs are fabricated.
 SOI — silicon on insulator, refers to placing a thin layer of silicon on top of an insulator such as SiO2.
 The devices will be built on top of the thin layer of silicon.
 The basic idea of SOI is to reduced the parasitic capacitance and hence faster switching speed.
 Every time a transistor is turned on, it must first charge all of its internal (parasitic) capacitance before it can begin to conduct.
 The time it takes to charge up and discharge (turn off) the parasitic capacitance is much longer than the actual turn on and off of the transistor.
 If the parasitic capacitance can be reduced, the transistor can be switched faster — performance.
 One of the major source of parasitic capacitance is from the source and drain to substrate junctions.
 SOI can reduced the capacitance at the source and drain junctions significantly — by eliminating the depletion regions extending into the substrate.
SOI CMOS
 Silicon-on-insulator CMOS offers a 20–35% performance gain over bulk CMOS.
 As the technology moves to the 0.13-µm generation, SOI is being used by more companies, and its application is spreading to lower-end microprocessors and SRAMs.
 Some of the recent applications of SOI in high-end microprocessors and its upcoming uses in low-power, radio-frequency (rf) CMOS, embedded DRAM (EDRAM), and the integration of vertical SiGe bipolar devices on SOI are described.
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MOSFET - Metal Oxide Semiconductor Field Effect Transistors - by seminar class - 28-03-2011, 12:02 PM

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