21-03-2011, 12:23 PM
ABSTRACT
• Micro Electro Mechanical Systems (MEMS) in the field of biomedical industry has given rise to Bio MEMS. These encompasses Biosensors, Bio instruments and tools, Bio testing and analysis etc
• Bio MEMS present a great challenge to engineers to design and manufacture of these types of sensors and instruments serves as the interface between living and electronic systems.
• These systems and the sensors should not affect the behavior of the living systems.
• Thin – film microelectronic technology offers special advantages for manufacturing of Biosensors over the traditional manufacturing methods.
• These can be used in minimizing the deleterious interactions through the use of small size and mass, Bio compatible material, and physical characteristics that are closely related to living tissues.
• Not only Bio MEMS the finger print sensor also discussed in this paper.
What are MEMS ?
(Micro-electromechanical Systems)
• Fabricated using micromachining technology
• Used for sensing, actuation or are passive micro- structures
• Usually integrated with electronic circuitry for control and/or information processing
