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SPUTTERING
OR
Physical Vapor Deposition – Evaporation
and Sputtering

Dr. Lynn Fuller
Microelectronic Engineering
Rochester Institute of Technology
82 Lomb Memorial Drive
Rochester, NY 14623-5604

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EVAPORATION TECHNIQUES
Aluminum - evaporate copper with tungsten wire basket. One pellet at 20 cm gives about 3000 A. Copper - evaporate copper with tungsten wire basket. The basket needs to be crushed a little so the openings are small and the copper does not fall out of the basket once it is melted. One pellet at 20 cm gives about 3000 A. Dimpled Tungsten boats work great. Chromium – use special Chromium coated tungsten wire filaments. Current through the filament heats the Cr which sublimes. Gold - gold or gold/germanium can easily be evaporated from a basket with tightly spaced loops. The basket needs to be crushed a little so the openings are small and the gold does not fall out of the basket once it is melted. Dimpled Tantalum boats work great. Moly boats are good because gold does not wet the Moly thus less gold is lost.