(16-03-2017, 04:08 PM)jaseela123d Wrote:

Plastic substrates are thinner, lighter, break resistant, flexible, rollable and foldable, making Silicon-on-Plastic an enabling technology for new applications / products. This paper studies the development of Silicon on Plastic technology.

Advances in polysilicon technology have extended TFT (thin film) technology to high-speed electronic applications such as smart cards, RFID tags, portable imaging devices, photovoltaic devices and solid state lights and other integrated circuit functions .

The challenge of Silicon-on-Plastic technology is to overcome the fact that plastic melts at the temperature required to build transistors in conventional TFT processes. Technological innovations have been made to accommodate the processing of silicon at low temperatures. This article describes an innovative ultra-low temperature poly-silicon TFT process on plastic substrates. Key technologies include oxide and silicon deposition steps at room temperature, laser crystallization and dopant activation. We review the manufacturing problems related to the compatibility of plastic materials in a TFT process. The lamination and de-lamination of plastic wafers to glass-bearing wafers for manufacturing are discussed. An active matrix TFT backplane will be fabricated with an OLED (Organic Light Emitting Diode) display to demonstrate this technology.