02-03-2012, 04:14 PM
MEMS TECHNOLOGY
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INTRODUCTION
MEMS: micro-electro-mechanical systems
Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.
MATERIALS FOR MEMS:
Materials are the basic things required to develop micro sensors
Metals
Polymers
Ceramic materials
Semiconductors
Composite materials
MICRO MACHINING TECHNOLOGY:
Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices
CONVENTIONAL ACCELEROMETER SENSOR
Made of bulky and heavy metal parts
Require high operating voltage/current
Needs careful maintenance
Highly expensive not throwaway type
