MEMS TECHNOLOGY

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INTRODUCTION

MEMS: micro-electro-mechanical systems

Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.


MATERIALS FOR MEMS:


Materials are the basic things required to develop micro sensors

Metals
Polymers
Ceramic materials
Semiconductors
Composite materials

MICRO MACHINING TECHNOLOGY:


Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices


CONVENTIONAL ACCELEROMETER SENSOR


Made of bulky and heavy metal parts
Require high operating voltage/current
Needs careful maintenance
Highly expensive not throwaway type