Abstract
MEMS varactors are one of the important passive MEMS devices. Their applica- tions include use in VCOs, tunable impedance matching networks, tunable ¯lters, phase shifters, and true time delay lines. The shunt capacitive structure has been employed in most of the conventional MEMS varactor designs because of its simplicity. However, the capacitance ratio of this conventional shunt capacitive MEMS varactor is limited to 1.5 because of the MEMS Pull- In e®ect, which happens when the de°ection between the MEMS top and bottom m ....etc

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The switched varactor for high power RF signals is described in this article. This varactor can perform tuneable capacitor operations up to 10 GHz frequencies. The RF micro-electro-mechanical systems (MEMS) has become an atractive area of research in the recent. Devices like tuners, antenna beam forming networks and reconfigurable filters all will benefit from this.

Design principles
In the case of RF MEMS which depend on the electrostatic actuation have a a small air gap in the micrometer range between their movable membrane and ....etc

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