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Crystalline-Silicon Solar Cells for the 21st Century


ABSTRACT
The worldwide market share for crystalline-silicon solar cells has
increased steadily in the last 10 years. In 1998, about 87% of the
photovoltaic modules shipped worldwide are based on crystalline
silicon. This dominance will likely continue into at least the first few
years of the 21st century. The long-term growth of crystalline-silicon
solar cells will depend on the development of low-cost ....etc

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Crystalline silicon solar cell manufacturing requires vacuum-based processing tools for many critical steps, from mono- to polycrystalline silicon growth to thin-film depositions on silicon wafers. Manufacturing efficiencies can be optimized by considering cost-of-ownership (CoO) parameters for vacuum subsystems based on dry pumps. Careful attention to vacuum systems can make a significant contribution to reduced costs, ultimately permitting profitable production of solar cells that will encourage widespread market growth.

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A SONOS memory cell is formed from a standard polysilicon NMOS transistor with the addition of a small sliver of silicon nitride inserted inside the transistor's gate oxide. The sliver of nitride is non-conductive but contains a large number of charge trapping sites able to hold an electrostatic charge. The nitride layer is electrically isolated from the surrounding transistor, although charges stored on the nitride directly affect the conductivity of the underlying transistor channel. The oxide/nitride sandwich typically consists of a 2 nm thi ....etc

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