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MICROELECTROMECHANICAL SYSTEMS



WHAT IS MEMS?
Submicron manufacturing promises to
provide economic solutions to meeting
increasingly demanding customer needs and, at the same time, decreasing time to market,energy consumption, and environmental costs. Manufacturing at the submicron level has four evolutionary advances in (1) miniaturization and (2) microelectromechanical systems (MEMS), as well as revolutionary advances in (3) nanofabrication and (4) biotechnology. This paper deals with MEMS.
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MEMS TECHNOLOGY



INTRODUCTION

MEMS: micro-electro-mechanical systems

Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.


MATERIALS FOR MEMS:


Materials are the basic things required to develop micro sensors

Metals
Polymers
Ceramic materials
Semiconductors
Composite materials

MICRO MACHINING TECHNOLOGY ....etc

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Micro-electro Mechanical Systems (MEMS)

Introduction
The satellite industry could experience its biggest revolution since it joined the ranks of commerce, thanks to some of the smallest machines in existence. Researchers are performing experiments designed to convince the aerospace industry that microelectromechanical systems (MEMS) could open the door to low-cost, high-reliability, mass-produced satellites.MEMS combine conventional semiconductor electronics with beams, gears, levers, switches, accelerometers, diaphragms, microfluidic thrus ....etc

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Introduction:
Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology - MST (in Europe).
MEMS are separate and distinct from the hypotheti ....etc

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