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MEMS TECHNOLOGY



INTRODUCTION

MEMS: micro-electro-mechanical systems

Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.


MATERIALS FOR MEMS:


Materials are the basic things required to develop micro sensors

Metals
Polymers
Ceramic materials
Semiconductors
Composite materials

MICRO MACHINING TECHNOLOGY ....etc

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APPLICATION OF MEMS TECHNOLOGY

ABSTRACT

MEMS (Micro-electro mechanical system) devices combines the merits of both electronic and mechanical systems .The MEMS technology has seen expansion in broad range from mechanical to chemical ,optical to bio-tech and many other fields .It is the integration of mechanical elements ,sensors ,actuators and electronics components on a single silicon substrate through micro fabrication technology .In this paper ,different MEMS devices are demonstrated like nanosatellite ,MEMS optical devices and bio-t ....etc

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MicroElectroMechanical Systems, MEMS, are systems based on a range of techologies whereby tiny mechanical elements, both sensors and actuators, can be implemented.It turns out that these elements have excellent system properties.The elements are often interfaced to microelectronical driving or sensing components (ICs) by appropriate packaging or on the same silicon wafer. The semiconductor silicon is not only good for making electronics but its material properties are extremely good.Thus, Micro electromechanical systems (MEMS) refer to a collec ....etc

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