Introduction to MEMS

[summer project pal]

Micro Electro Mechanical Systems(MEMS)

Seminar presentation
By



Krishna Kumar.V
Roll no:26
Semester: seven

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MEMS : A Technology from Lilliput
MEMS - acronym for Micro Electro-Mechanical Systems.

It is a portfolio of techniques and processes to design and create miniature systems.

That means- it is simultaneously a toolbox, a physical product and a methodology all in one

It is at it’s developing stage- main application are in automobile and medical field.
Example- 1. Air bag safety system
2. Pace makers etc…





The Sandbox: Materials for MEMS
MEMS mainly uses Silicon material system.
Silicon material system consists of
1) silicon
2) silicon oxide and nitrides
MEMS also uses
polymers –in the form of polyimides or photoresist
thin metal films - nickel, permalloy, titanium, aluminium etc…
Other materials and substrates used in MEMS are
1) Glass and quartz substrates.
2) Silicon carbide and diamond.
3) Gallium arsenide and other group III-V compound semiconductors.
4) Shape-memory alloys.
The Toolbox: Process for MEMS
The set of design and fabrication tools that precisely machine from structures and elements at a micro scale.

It is a parallel (batch) process.

Mainly tools for this can be divided into two
1) Basic process tools
2) Advanced process tools

Actual surface micro machining is a combination of any of these tools, which may depend on the type of application.
Illustration of the basic process tools
Commercial MEMS Structures and Systems
General design methodology
Techniques for sensing and actuation
i) common sensing methods
ii) common actuation methods
Common sensing methods
1) Piezoresistive
2) Capacitive
3) Electromagnetic
Common actuation methods
Electrostatic, Thermal, Magnetic, Piezoresistive, phase recovery using shape-memory alloys etc…


Relative merits of sensing methods
Illustration of MEMS: Micro pump
Thank you!