27-09-2010, 10:59 AM
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NANO-ELECTRO-MECHANICAL SYSTEM(NEMS
abstract
Nano-Electro-Mechanical system (NEMS) is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate.
The Nano mechanical components are fabricated using compatible “micromachining” process.
NEMS is the enabling technology allowing the development of smart products.