[attachment=14924]
MEMS: micro-electro-mechanical systems
Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.
Same as the process steps used for making conventional electronic circuits
CHEMICAL DEPOSITION
Chemical vapour deposition
PHYSICAL DEPOSITION
Sputtering
Application of photo resist
Optical exposure to print an image of the mask onto the resist
Immersion in an aqueous developer solution to dissolve the exposed resist
Materials are the basic things required to develop micro sensors
Metals
Polymers
Ceramic materials
Semiconductors
Composite materials
Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices
BULK micromachining:
SURFACE micromachining:
LIGA process:
Significantly lower manufacturing costs
Small inertial mass
Particularly realized in the area of:
– sensors
– signal switching
Imprecise fabrication methods
Expensive and complex packaging
CAD Design tool inaccuracies
Accelerometers in consumer electronics devices such as game controllers
Communications
biotechnology
As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives.
It has the potential to change our daily life as much as computer