Optical waveguides:
End view of QC facet with ridge waveguide. Darker gray: InP, lighter gray: QC layers, black: dielectric, gold: Au coating. Ridge ~ 10 um wide.
End view of QC facet with buried heterostructure waveguide. Darker gray: InP, lighter gray: QC layers, black: dielectric. Heterostructure ~ 10 um wide
The first step in processing quantum cascade gain material to make a useful light-emitting device is to confine the gain medium in an optical waveguide. This makes it possible to direct the emitted light into a collimated beam, and allows a laser resonator to be built such that light can be coupled back into the gain medium.
Two types of optical waveguides are in common use. A ridge waveguide is created by etching parallel trenches in the quantum cascade gain material to create an isolated stripe of QC material, typically ~10 um wide, and several mm long. A dielectric material is typically deposited in the trenches to guide injected current into the ridge, then the entire ridge is typically coated with gold to provide electrical contact and to help remove heat from the ridge when it is producing light. Light is emitted from the cleaved ends of the waveguide, with an active area that is typically only a few micrometers in dimension.
The second waveguide type is a buried heterostructure. Here, the QC material is also etched to produce an isolated ridge. Now, however, new semiconductor material is grown over the ridge. The change in index of refraction between the QC material and the overgrown material is sufficient to create a waveguide. Dielectric material is also deposited on the overgrown material around QC ridge to guide the injected current into the QC gain medium. Buried heterostructure waveguides are efficient at removing heat from the QC active area when light is being produced.