micro electro mechanical systems

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Energy Domains
• Thermal (temperature, heat and heat flow)
• Mechanical (force, pressure, velocity, acceleration, position)
• Chemical (concentration, pH, reaction rate)
• Magnetic (field intensity, flux density, magnetization)
• Radiant (intensity, wavelength, polarization, phase)
• Electrical (voltage, charge, current)


Scaling of Forces
• The force due to surface tension
scales as S1
• The force due to electrostatics with
constant field scales as S2
• The force due to certain magnetic
forces scales as S3
• Gravitational forces scale as S4



Gravitational Potential Energy
Gravitational potential energy scales as S4. If the
dimensions of a system are scaled from meters
(human size) to 0.1 mm (ant size), the gravitational
potential energy scales as:
(1/10000)4 = 1/10,000,000,000,000,000
The potential energy decreases by a factor of ten
trillion. This is why an ant can walk away from a
fall that is 10 times it’s height, and we do not!



Why Micromachine?
• Minimize energy and materials use in manufacturing
• Redundancy and arrays
• Integration with electronics
• Reduction of power budget
• Faster devices
• Increased selectivity and sensitivity
• Exploitation of new effects through the breakdown of
continuum theory in the micro-domain
• Cost/performance advantages
• Improved reproducibility (batch fabrication)
• Improved accuracy and reliability
• Minimally invasive (e.g. pill camera)