what is special in this topic

MEMS is a very good seminar topic. Its in development phase and some mobile companies have already implemented motion sensors using MEMS in their mobile phones(Seen the nokia touchscreen phone with the motion sensor game or LG cookie with that game in which we tilt the phone and the ball moves as if it was in a tray?) Lot of people have chosen this as their seminar topic. Visit these threads to know more and make a decision yourself:
http://studentbank.in/report-micro-elect...stems-mems
http://studentbank.in/report-mems-in-space
http://studentbank.in/report-mems-switches