Microfabrication technology has been successful in producing a wide range of miniature sensors and mechanical devices. Of particular interest is the application of this technology to biological systems. For instance an immunobiosensor for a bacterial food toxin with a sensitivity of 1 ng/mL and miniature reaction chambers have been fabricated for DNA analysis sequencing by hybridization. The integration of sensors with other components, particularly fluidic devices, offers the promise of microsystems. A miniature positive displacement micropump with a flow rate of 0.1-10 ?L/min. has been fabricated, and tested with water as the working fluid. The future looks very promising for the continued development of these devices in a wide range of fields from environmental monitoring, medical sampling and diagnostics, to precision manufacturing systems


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