18-04-2013, 10:09 AM
Ion Beams Machining (IBM) is an important nonconventional manufacturing technology (Hellborg et al. 2009), which uses a stream of accelerated ions by electrical means in a vacuum to remove, add, or modify atoms on the surface of the object. IBM can be classified into two main categories, that is, Large-area Ion Beam Machining (LIBM) technology and Focused Ion Beam Machining (FIBM) technology