Micro-electro Mechanical Systems (MEMS)

Introduction
The satellite industry could experience its biggest revolution since it joined the ranks of commerce, thanks to some of the smallest machines in existence. Researchers are performing experiments designed to convince the aerospace industry that microelectromechanical systems (MEMS) could open the door to low-cost, high-reliability, mass-produced satellites.MEMS combine conventional semiconductor electronics with beams, gears, levers, switches, accelerometers, diaphragms, microfluidic thrus ....etc

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The satellite industry could experience its biggest revolution since it joined the ranks of commerce, thanks to some of the smallest machines in existence. Researchers are performing experiments designed to convince the aerospace industry that microelectromechanical systems (MEMS) could open the door to low-cost, high-reliability, mass-produced satellites. MEMS combine conventional semiconductor electronics with beams, gears, levers, switches, accelerometers, diaphragms, microfluidic thrusters, and heat controllers, all of them microscopic in s ....etc

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MicroElectroMechanical Systems, MEMS, are systems based on a range of techologies whereby tiny mechanical elements, both sensors and actuators, can be implemented.It turns out that these elements have excellent system properties.The elements are often interfaced to microelectronical driving or sensing components (ICs) by appropriate packaging or on the same silicon wafer. The semiconductor silicon is not only good for making electronics but its material properties are extremely good.Thus, Micro electromechanical systems (MEMS) refer to a collec ....etc

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i want a report on mems technology,as it is the most effective and most developing technology in electronics in the present day world i want to learn something about gyroscopes used in smart phones. ....etc

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i want to know about Micro electro mechanical system in industrial automation.............. ....etc

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APPLICATION OF MEMS TECHNOLOGY

ABSTRACT

MEMS (Micro-electro mechanical system) devices combines the merits of both electronic and mechanical systems .The MEMS technology has seen expansion in broad range from mechanical to chemical ,optical to bio-tech and many other fields .It is the integration of mechanical elements ,sensors ,actuators and electronics components on a single silicon substrate through micro fabrication technology .In this paper ,different MEMS devices are demonstrated like nanosatellite ,MEMS optical devices and bio-t ....etc

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Presented By:
S.G. Lokhre, K. Virwanif , B. Gajananf , S.P. Pai, P.R. Apte

Solid State Electronics Department
Tata Institute of Fundamental Research
Homi Bhabha Road
Colaba, BOMBAY - 400 005, India

ABSTRACT

We have designed, fabricated and tested a balanced doubly suspended versatile, torsion and flexural, MEMS resonator structure. The doubly suspended structure has been used earlier for very precise high Q resonators but we wished to study the various vibration modes of such a structure. FEM analysis has been ....etc

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Compound solid state switches such as GaAs MESFETs and PIN diodes are widely used in microwave and millimeter wave integrated circuits (MMICs) for telecommunications applications including signal routing, impedance matching networks, and adjustable gain amplifiers. However, these solid-state switches have a large insertion loss (typically 1 dB) in the on state and poor electrical isolation in the off state. The recent developments of micro-electro-mechanical systems (MEMS) have been continuously providing new and improved paradigms in the field ....etc

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